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Organizations
others on back-surface illumination
The purpose of this Standard is regulation of defects test method for plastics films with high gas barrier
This Guide was developed to support the proactive quality management approach
7 mmまたは800 × 950 × 0
E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-0310 - Superseded OrganizationsThis Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document